
March 2000
ISOM starts its activities at the ETSIT-UPM in the current facilities, using equipment from different research groups from ETSIT-UPM, and taking advantage of a donation of equipment from the Optoelectronics Center of Telefónica I+D via the Comunidad de Madrid.

November 2001
ISOM is recognized as a Gran Instalación Científica (GIC) by the Spanish Government. This denomination means ISOM can provide services to external players within a Government-funded program. The current denomination for GIC is Instalación Científico Técnica Singular (ICTS).

October 2014
ISOM becomes one node of the distributed network of cleanrooms called MICRONANOFABS, which also includes the Barcelona Microelectronics Institute (IMB-CNM) and Valencia Nanophotonics Technology Center (NTC).