Systems of deposit of thin layers by chemical methods CVD and PECVD

Graphene CVD system

Sistema CVD de grafeno
  • 4 inch cold wall reactor Aixtron Black Magic Pro
  • Gaseous precursors injected with a diffuser system
  • Temperature control via thermocouple or optical pyrometer
  • Growth under low pressure or close to atmospheric pressure
  • Possibility of inducing a DC or pulsed plasma