Seactive dry attacks system (RIE)

RIE System (Dry Attack)

Sistema de ataque seco reactivo (RIE)
Sistema de ataque seco reactivo (RIE) 1

Reactive ion attack system (RIE) (Plasmalab µ80)

  • Plasma generated with RF source
  • Pumping withPfeiffer Drag TPH 2101 turbo molecular pump
  • Gases installed:
    • Silicon tetrachloride (SiCl4)
    • Hydrogen (H2)
    • Oxygen (O2)
    • Argon (Ar)
    • Sulfur hexafluoride (SF6)
    • Carbon tetrachloride (CF 4 )

Systems of deposit of thin layers by chemical methods CVD and PECVD

Equipo aixt

 4 inch cold wall reactor  Aixtron Black Magic Pro

  • Gaseous precursors injected with a diffuser system
  • Temperature control via thermocouple or optical pyrometer
  • Growth under low pressure or close to atmospheric pressure
  • Possibility of inducing a DC or pulsed plasma