Molecular beam epitaxial growth systems (MBE) and associated transfer and metallization

chambers

MBE system for growth of Arsenides (RIBER32) 

Sistema de Mbe

Molecular Beam Epitaxy Reactor (MBE)   MECA2000   for the growth of semiconductors based on Group III Nitrides

• Ultra high vacuum growth chamber with base pressure of 5 × 10 -11 Torr. Pumping system: combination of ionic + cryogenic pumps and cryopanels of liquid nitrogen 
• Intermediate chamber for electron vacuum metallizations in ultra high vacuum 
• 5 sources of effusion (Knudssen cells): Ga, Al, In, Si, Be 
• 1 Arsenic cracker (RIBER) 
• Nitrogen RF plasma source (CARS25 Oxford Applied Research)
• Optical pyrometer for growth temperature measurement (IRCON V series) 
• 10 kV RHEED system 
•  Residual gas analyzer (quadrupole, model Prisma de Balzers)

MBE system for growth of Nitrides (MECA2000)

Sistema de Mbe nitruros

Molecular Beam Epitaxy Reactor (MBE)   MECA2000   for the growth of semiconductors based on Group III Nitrides

• Ultra high vacuum growth chamber with base pressure of 5 × 10-11 Torr. Pumping system: combination of ionic + cryogenic pumps and liquid nitrogen cryopanels 
• 6 effusion sources (Knudssen cells): Ga (double filament), Al, In, Si, Be and Mg 
• RF plasma nitrogen source (Unibulb from Applied Epi brand) 
• Optical pyrometer for growth temperature measurement (IRCON V series) 
• 15 kV RHEED system 
• Residual gas analyzer (quadrupole) model Prisma de Balzers

MBE system for growth of Nitrides (RIBER COMPACT 21) 

Molecular Beam Epitaxy Reactor (MBE) RIBER Compact Model 21S for the growth of semiconductors based on Group III Nitrides

• Ultra high vacuum growth chamber with base pressure of 3.5 × 10-11 Torr. Pumping system combination ionic + cryogenic pumps and liquid nitrogen cryopanel
• 6 effusion sources (Knudssen cells): Ga (double strand), Al, In (double strand), Si, Be and Mg 
• RF plasma nitrogen source of the Addon brand 
• IRCON V series optical pyrometer for growth temperature measurement 
• RHEED system of 15 keV
• Residual gas analyzer (quadrupole)